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EQUIPMENT

EquipmentDevices & Displays Research Lab.

Process Facilities and Equipment
Photochemical process

Name Mask aligner UV exposure
Model
Manufacture
Spec1 Sample Size 4“
Spec2 Contact, Non-contact, Vacuum mode
Spec3
Make a Reservation

Name DUV Chamber (Xe)
Model
Manufacture
Spec1 250 ~ 700 nm (100%)
Spec2
Spec3

Unable to apply for

Name DUV Chamber (Excimer)
Model
Manufacture
Spec1 172 m, (100%)
Spec2
Spec3

Unable to apply for

Name DUV Chamber (Hg)
Model
Manufacture
Spec1 184.9nm (10%)
Spec2 253.7nm (90%)
Spec3

Unable to apply for

Name DUV Chamber (Hg)
Model
Manufacture
Spec1 184.9nm (10%)
Spec2 253.7nm (90%)
Spec3

Unable to apply for

Vacuum process

Name Thermal Evaporator
Model
Manufacture
Spec1 Metal Ag/Al/Au/Cr/Ni
Spec2 Sample Size 4“
Spec3
Make a Reservation

Name RF-Sputter
Model
Manufacture
Spec1 Materials Metals
Spec2 Sample Size 4“
Spec3
Make a Reservation

Name ALD
Model
Manufacture
Spec1 Sample Size 5“
Spec2 AlOx, ZnOx, and etc.
Spec3
Make a Reservation

Name RF-Magnetron Sputter
Model
Manufacture
Spec1 Sample Size 3“
Spec2 ITO, IGZO, and etc.
Spec3 Co-sputtering with 3 targets

Unable to apply for

Name Reactive Ion Etcher
Model
Manufacture
Spec1 Sample Size 4“Ar, O2, CF4 gases, ~ 200 W
Spec2
Spec3

Unable to apply for

Solution process

Name Spin-Coater
Model
Manufacture
Spec1 Sample Size 4“
Spec2
Spec3

Unable to apply for

Name Sonicator
Model
Manufacture
Spec1
Spec2
Spec3

Unable to apply for

Name Wet Station
Model
Manufacture
Spec1 Wet etching Al/Au/Cr
Spec2
Spec3

Unable to apply for

Name Glove Box
Model
Manufacture
Spec1 Metal & Organic, Nano-particles, QDs
Spec2 Sample Size 4“
Spec3 OLEDs, OPVs

Unable to apply for

Name Glove Box
Model
Manufacture
Spec1 Metal & Organic, Nano-particles, QDs
Spec2 Sample Size 4“
Spec3 OLEDs, OPVs

Unable to apply for

Measurement & Analysis

Name Prove Station
Model
Manufacture
Spec1
Spec2
Spec3

Unable to apply for

Name Vacuum Prove Station
Model
Manufacture
Spec1
Spec2
Spec3

Unable to apply for

Name Polarized Optical Microscope
Model
Manufacture
Spec1 Sample Size 4“
Spec2 Contact, Non-contact, Vacuum mode
Spec3

Unable to apply for

Name AFM
Model
Manufacture
Spec1 Sample Size 4“ Non-contact, Vacuum mode
Spec2
Spec3

Unable to apply for

Name Ellipsometer
Model
Manufacture
Spec1
Spec2
Spec3

Unable to apply for

Maintenance

Name DI water system
Model
Manufacture
Spec1
Spec2
Spec3

Unable to apply for

Name Temperature & humidity Control System
Model
Manufacture
Spec1 Temperature : 25°
Spec2 Humidity : 30%
Spec3

Unable to apply for

Name N2 Generator
Model
Manufacture
Spec1 Capacity : 15 N-m2/Hour
Spec2 Purity : 99.99%
Spec3 N2 pressure : 5 bar

Unable to apply for